... magnetron磁控管 magnetron discharge磁控管放电 magnetron enhanced reactive ion etaching system磁控管增强型反应性离子蚀刻系统 ...
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The functional requirements of a vacuum pressure measurement machine based on the principle of magnetron discharge was described.
介绍了基于磁控放电原理的真空度测试仪的研制。
The pressure measurement and the design basics of the co-axial pulsed magnetron discharge vacuum gauge for vacuum interrupters were discussed.
介绍了同轴场式脉冲磁控真空计的测量原理以及设计中的有关问题。
Two types of exciting coils have been used to obtain the relationship of the internal pressures and the ionic currents of magnetron discharge for 5 types of vacuum interrupter.
应用两种形式的励磁线圈，实测了五种型号的真空灭弧室内气体压强与磁控放电离子电流的关系曲线，并对试验结果进行了理论分。
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